The A-725 platform functions by moving across a single reference plane, a departure from conventional stacked configurations that inherently introduce Abbe offsets and geometric inaccuracies. This design choice provides a more stable foundation for sensitive operations such as wafer inspection, laser dicing, and optical alignment. The unit features a 250 mm platform diameter capable of supporting payloads up to 8 kg, with vertical travel of 5 mm and tip/tilt adjustments of ±2°.
Physik Instrumente Launches A-725 Five-Axis Nanopositioning Stage
Engineers at Physik Instrumente have unveiled the A-725, a five-degree-of-freedom air bearing system engineered to streamline high-precision tasks in semiconductor manufacturing and photonics. By integrating a planar XY stage with a parallel-kinematics module, the system aims to replace traditional stacked designs that often suffer from cumulative mechanical error.
To eliminate the friction and cogging associated with mechanical bearings, the system utilizes ironless three-phase linear motors across all five axes. PI delivers the A-725 as a turnkey solution, pre-configured with ACS-based controllers to accelerate deployment in factory environments. Available with XY travel ranges spanning from 100×100 mm to 300×400 mm, the stage is positioned to serve industries requiring rigorous multi-axis alignment and metrology at the nanoscale.
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